The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 2021

Filed:

Jul. 09, 2019
Applicant:

Scienta Omicron Ab, Uppsala, SE;

Inventors:

Tomas Wiell, Uppsala, SE;

Christopher Liljenberg, Uppsala, SE;

Pål Palmgren, Järfälla, SE;

Assignee:

Scienta Omicron AB, Uppsala, SE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/2273 (2018.01); H01J 35/06 (2006.01); G21K 1/06 (2006.01); H01J 49/44 (2006.01); H01J 49/06 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2273 (2013.01); G21K 1/06 (2013.01); H01J 35/064 (2019.05); H01J 49/06 (2013.01); H01J 49/44 (2013.01); G21K 2201/062 (2013.01); G21K 2201/064 (2013.01); G21K 2201/067 (2013.01);
Abstract

The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray tube, an X-ray monochromator, and a sample. The X-ray tube provides a beam of photons, which via the X-ray monochromator is directed through the system so as to excite electrons from the illuminated sample. The X-ray tube is connected to a monochromator vacuum chamber in which the X-ray monochromator is configured to monochromatize and focus the beam onto the sample. The monochromator vacuum chamber is connected to an analysis vacuum chamber, the illuminated sample being mounted inside the analysis vacuum chamber and the analysis vacuum chamber being connected to an electron energy analyser. The electron energy analyser is mounted onto the analysis vacuum chamber. Further, the beam of photons provided from the X-ray tube is divergent and has an energy above 6 keV. The X-ray monochromator also comprises a curved optical element arranged to both monochromatize and focus the diverging beam of photons.


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