The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2021
Filed:
Dec. 28, 2015
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Dino Faralli, Milan, IT;
Laura Maria Castoldi, Abbiategrasso, IT;
Paolo Ferrari, Gallarate, IT;
Marta Carminati, Casatenovo, IT;
Assignee:
STMICROELECTRONICS S.R.L., Agrate Brianza, IT;
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/16 (2006.01); B41J 2/14 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/285 (2006.01); C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
B41J 2/1433 (2013.01); B41J 2/14024 (2013.01); B41J 2/14032 (2013.01); B41J 2/14129 (2013.01); B41J 2/162 (2013.01); B41J 2/1603 (2013.01); B41J 2/1623 (2013.01); B41J 2/1626 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1632 (2013.01); B41J 2/1642 (2013.01); B41J 2/1643 (2013.01); B41J 2002/14483 (2013.01); C23C 16/345 (2013.01); H01L 21/0237 (2013.01); H01L 21/28556 (2013.01); H01L 21/31138 (2013.01); Y10T 29/49083 (2015.01); Y10T 29/49401 (2015.01);
Abstract
Methods for manufacturing a microfluidic delivery device comprising a semiconductor structure, such as silicon, are provided. In particular, the structure for delivering fluid may be formed from polycrystalline silicon, also called polysilicon, or epitaxial silicon. The microfluidic delivery device that predominantly uses semiconductor material, such as silicon, to form the structures that are in contact with the dispensed fluid results in a device that is compatible with a wide set of fluids and applications.