The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Aug. 12, 2020
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Tomoyoshi Tai, Inazawa, JP;
Ryosuke Hattori, Ichinomiya, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/312 (2013.01); H03H 3/08 (2006.01); H03H 9/25 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02574 (2013.01); H01L 41/312 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/25 (2013.01);
Abstract
A bonded body includes a supporting substrate, a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate, and an amorphous layer present between the supporting substrate and piezoelectric material substrate. The amorphous layer contains one or more metal element selected from the group consisting of niobium and tantalum, an element constituting the supporting substrate and oxygen element. The concentration of the metal element in the amorphous layer is higher than the concentration of oxygen element and 20 to 65 atom %.