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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10998279 B1

PDFFull Text
Date of Patent:
May. 04, 2021

Filed:

Aug. 27, 2018

On-chip integrated cavity resonator

Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Dmitri Alex Tschumakow, Dresden, DE;

Claus Dahl, Dresden, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:

Harrity & Harrity, LLP

Primary Examiner:

Dale E Page

Assistant Examiner:

Quovaunda Jefferson

Int. Cl.
CPC ...
H01L 23/66 (2006.01); H01P 7/06 (2006.01); H01P 11/00 (2006.01); G01J 3/28 (2006.01); H01L 21/308 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); H01L 21/3205 (2006.01); G01N 22/00 (2006.01); H01Q 13/10 (2006.01);
U.S. Cl.
CPC ...
H01L 23/66 (2013.01); H01P 7/065 (2013.01); H01P 11/008 (2013.01); G01J 3/2803 (2013.01); G01N 22/00 (2013.01); H01L 21/308 (2013.01); H01L 21/31144 (2013.01); H01L 21/32051 (2013.01); H01L 21/32139 (2013.01); H01L 2223/6627 (2013.01); H01L 2223/6677 (2013.01); H01Q 13/10 (2013.01);
Abstract

A semiconductor chip may include high frequency electrical circuitry. The semiconductor chip may include a cavity resonator integrated with the high frequency electrical circuitry in a semiconductor substrate of the semiconductor chip. The cavity resonator may include a resonator body in a cavity in the semiconductor substrate of the semiconductor chip. The resonator body may comprise a metal layer. The cavity resonator may include a feeding structure electrically connected to the high frequency electrical circuitry.

Find Patent Forward Citations

Tschumakow, Dmitri. (2021). On-chip integrated cavity resonator (U.S. Patent No. 10998279). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10998279

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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