The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 04, 2021

Filed:

Dec. 20, 2018
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Matthias Eberl, Taufkirchen, DE;

Franz Jost, Stuttgart, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 29/24 (2006.01); G01J 1/16 (2006.01); G01J 1/42 (2006.01); G01N 21/17 (2006.01);
U.S. Cl.
CPC ...
G01N 29/2425 (2013.01); G01J 1/1626 (2013.01); G01J 1/42 (2013.01); G01N 21/1702 (2013.01); G01J 2001/4242 (2013.01); G01N 2021/1704 (2013.01); G01N 2291/021 (2013.01);
Abstract

An apparatus containing an optical emitter configured to emit optical radiation is provided. Further, the apparatus includes a first hermetically sealed measurement cell filled with a first gas. The first gas is configured to absorb the optical radiation at least partially at one or more predetermined wavelengths. Additionally, the apparatus includes a first microphone arranged in the measurement cell and configured to generate a first microphone signal on a basis of a photoacoustic excitation of the first gas by the optical radiation. The apparatus moreover includes an evaluation circuit configured to take the first microphone signal as a basis for generating a first measurement signal indicating an emission intensity of the optical emitter at the one or more predetermined wavelengths.


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