The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Aug. 20, 2018
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Ichiro Sase, Yokohama, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 1/30 (2006.01); G01N 1/44 (2006.01); G01N 23/225 (2018.01); G01N 23/04 (2018.01); H01J 37/20 (2006.01); G02B 21/36 (2006.01); G02B 21/00 (2006.01); G02B 21/06 (2006.01); G01N 1/42 (2006.01); C12M 1/12 (2006.01); G01N 21/64 (2006.01);
U.S. Cl.
CPC ...
G01N 1/30 (2013.01); C12M 25/00 (2013.01); G01N 1/42 (2013.01); G01N 1/44 (2013.01); G01N 23/225 (2013.01); G02B 21/0088 (2013.01); G02B 21/06 (2013.01); G02B 21/361 (2013.01); H01J 37/20 (2013.01); G01N 21/6428 (2013.01); G01N 23/04 (2013.01);
Abstract
A sample preparation method includes: irradiating a first region of a sample with light at a time t1; irradiating a second region different from the first region with the tight at a time t2 after the time t1; and fixing the sample at a time t3 after the time t2. A sample preparing apparatus includes: a light radiating unit that irradiates a first region of a sample with light at time t1 and irradiates a second region different from the first region with the light at a time t2 after the time t1; and a fixing unit that fixes the sample at a time t3 after the time t2.