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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10995422 B1

PDFFull Text
Date of Patent:
May. 04, 2021

Filed:

May. 26, 2017

Gaas substrate and method for manufacturing the same

Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Shinya Fujiwara, Osaka, JP;

Yasuaki Higuchi, Osaka, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Attorney:

Faegre Drinker Riddle & Reath LLP

Primary Examiner:

Daniel J Schleis

Assistant Examiner:

Kevin C T Li

Int. Cl.
CPC ...
C30B 11/00 (2006.01); C30B 29/42 (2006.01); C30B 33/10 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); C30B 29/38 (2006.01); C30B 33/00 (2006.01);
U.S. Cl.
CPC ...
C30B 29/42 (2013.01); C30B 11/00 (2013.01); C30B 29/38 (2013.01); C30B 33/00 (2013.01); C30B 33/10 (2013.01); H01L 21/304 (2013.01); H01L 21/306 (2013.01);
Abstract

A GaAs substrate has a first surface. The sum of the number of particles having a longer diameter of more than or equal to 0.16 μm which are present in the first surface, per cmof the first surface, and the number of damages having a longer diameter of more than or equal to 0.16 μm which are present in a second surface, per cmof the second surface, is less than or equal to 2.1, the second surface being formed by etching the first surface by 0.5 μm in a depth direction.

Find Patent Forward Citations

Fujiwara, Shinya. (2021). Gaas substrate and method for manufacturing the same (U.S. Patent No. 10995422). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10995422

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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