The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Jul. 12, 2019
Applicant:
SK Hynix Inc., Icheon, KR;
Inventor:
Jun Ku Ahn, Hwaseong, KR;
Assignee:
SK hynix Inc., Icheon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/06 (2006.01); C23C 14/54 (2006.01); B23P 15/26 (2006.01);
U.S. Cl.
CPC ...
C23C 14/34 (2013.01); B23P 15/26 (2013.01); C23C 14/0617 (2013.01); C23C 14/541 (2013.01); H01J 37/3435 (2013.01); H01J 37/3497 (2013.01);
Abstract
A sputtering target includes: a base configured to transfer heat in a basal plane direction; and a first heat sink disposed on a sidewall of the base, the first heat sink configured to transfer heat along a direction that is different from the basal plane direction.