The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Nov. 25, 2019
Service Support Specialties, Inc, Montville, NJ (US);
Gary Hillman, Livingston, NJ (US);
Victoria Rocha, Jackson, NJ (US);
Abstract
A method and/or system for coating a substrate with a coating material. The coating material may be a polymer such as a photoresist. The method involves dispensing a coating material onto a substrate during which a temperature differential between the coating material and the substrate is at least 5° C. This temperature differential may be achieved by cooling the substrate and/or heating the coating material prior to dispensing the coating material onto the substrate. Due to the temperature differential, as the coating material contacts the substrate the viscosity of the coating material will increase, assisting the coating material in adhering to the substrate. Then, when the substrate is spun, the coating material with the increased viscosity will remain adhered to the substrate thereby providing a more conformal coating.