The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Sep. 09, 2019
Applicant:
Shin Sung C&t Co., Ltd., Seoul, KR;
Inventors:
Sang woo Lee, Ann Arbor, MI (US);
Ci Moo Song, Yongin-si, KR;
Keun Jung Youn, Incheon, KR;
Yong Kook Kim, Seoul, KR;
Kyu dong Jung, Suwon-si, KR;
Muhammad Ali Shah, Seoul, KR;
Assignee:
SHIN SUNG C&T CO., LTD., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/04 (2006.01); H04R 19/00 (2006.01); H04R 1/04 (2006.01); H04R 7/16 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
H04R 19/04 (2013.01); B81B 3/0037 (2013.01); H04R 1/04 (2013.01); H04R 7/16 (2013.01); H04R 19/005 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01); H04R 2201/003 (2013.01);
Abstract
Provided is a MEMS acoustic sensor including a substrate and a cavity, a back plate supported on the substrate and including a plurality of through-holes, at least one anchor projecting from the back plate toward the substrate, and a diaphragm supported by the at least one anchor and deformed by a sound wave introducing from the outside through the cavity, wherein no part of the deformed diaphragm comes into contact with the substrate.