The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Oct. 27, 2016
Sanken Electric Co., Ltd., Niiza, JP;
Shunsuke Fukunaga, Niiza, JP;
Taro Kondo, Niiza, JP;
SANKEN ELECTRIC CO., LTD., Niiza, JP;
Abstract
A semiconductor device includes: a semiconductor base; a trench insulating film which is provided on the inner wall surface of a trench formed from the upper surface of the semiconductor base in a film thickness direction of the semiconductor base and including a charged region which is charged positively; and a gate electrode provided on the trench insulating film within the trench. The positive charge density of the charged region at least in a side part of an outer region of the trench insulating film which is provided on the side surface of the trench is higher than that of an inner region of the trench insulating film which is opposite to the outer region, the outer region being in contact with the semiconductor base.