The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Aug. 30, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Yoshiei Tanaka, Hachioji, JP;
Katsunori Hirota, Yamato, JP;
Yusuke Onuki, Fujisawa, JP;
Tsutomu Tange, Yokohama, JP;
Takumi Ogino, Koganei, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A silicon compound film that is any one of a silicon oxide film, a silicon nitride film, and a silicon carbide film, and a metal compound film lying between the silicon compound film and a semiconductor layer are arranged above a main face. The silicon compound film and the metal compound film extend into a first trench, and the metal compound film extends into a second trench. When a distance from the bottom of the second trench to the silicon compound film is expressed as 'Hb', and a distance from the main face to the silicon compound film is expressed as 'Hd', the respective distances satisfy the condition “Hd<Hb”.