The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

Jan. 23, 2017
Applicant:

University of Southampton, Highfield, GB;

Inventors:

David John Thomson, Highfield, GB;

Graham Trevor Reed, Highfield, GB;

Robert Topley, Highfield, GB;

Assignee:

University of Southampton, Southampton, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/265 (2006.01); G02B 6/134 (2006.01); H01L 21/268 (2006.01); H01L 21/324 (2006.01); H01L 21/67 (2006.01); H01L 21/66 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/26506 (2013.01); G02B 6/1347 (2013.01); H01L 21/268 (2013.01); H01L 21/324 (2013.01); H01L 21/67115 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01); G02B 2006/12171 (2013.01); G02B 2006/12188 (2013.01);
Abstract

A method of trimming the refractive index of material forming at least part of one or more structures integrated in one or more pre-fabricated devices, the method comprising: implanting one or more first regions of material of one or more pre-fabricated devices, encompassing at least partially one or more device structures, with ions to alter the crystal form of the material within the one or more first regions and change the refractive index of the material within the one or more first regions; and heat treating one or more second regions of material of the one or more devices, encompassing at least partially the one or more first regions, to alter the crystal form of the material within the one or more first regions encompassed by the one or more second regions and change the refractive index thereof, thereby trimming the refractive index of the material of at least part of the one or more device structures, such that the one or more device structures provide one or more predetermined device outputs.


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