The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

Oct. 25, 2019
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

Keith E. Kowal, Swampscott, MA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/304 (2013.01); H01J 37/3171 (2013.01);
Abstract

A monitoring circuit that includes a pickup loop to monitor a voltage applied to a cavity of a linear accelerator is disclosed. The monitoring circuit is electrically isolated from the linear accelerator and is also electrically isolated from the controller that receives input from the circuit and controls the linear accelerator. In certain embodiments, the monitoring circuit also includes an energy harvester so as to capture energy without any physical connection to the controller. This may be achieved using light energy or electromagnetic energy, for example. In certain embodiments, the monitoring circuit includes an analog-to-digital converter to convert the signals received from the pickup loop to digital values. In other embodiments, the monitoring circuit passes analog voltages to the controller. The outputs from the monitoring circuit may include the amplitude and phase of the voltage being applied to the respective cavity.


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