The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Apr. 27, 2017
Applicant:
Dow Silicones Corporation, Midland, MI (US);
Inventors:
Peng-Fei Fu, Midland, MI (US);
Wonbum Jang, Cheongju, KR;
Assignee:
Dow Silicones Corporation, Midland, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); C08K 5/17 (2006.01); C08L 83/06 (2006.01); C07F 7/21 (2006.01); C08K 5/04 (2006.01); C08G 77/04 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01); H01L 21/027 (2006.01); C08G 77/14 (2006.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); C07F 7/21 (2013.01); C08G 77/045 (2013.01); C08K 5/04 (2013.01); C08K 5/17 (2013.01); C08L 83/06 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2002 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/2039 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); H01L 21/0274 (2013.01); C08G 77/14 (2013.01); C08G 77/70 (2013.01);
Abstract
A silsesquioxane-containing composition comprising a silsesquioxane resin and an oxaamine of formula (II) (see description), products prepared therefrom, photoresist compositions comprising the silsesquioxane-containing composition and a photoacid generator, products prepared therefrom, methods of making and using same, and manufactured articles and semiconductor devices containing same.