The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Jul. 18, 2018
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Edward Brian Fletcher, Austin, TX (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); G03F 7/00 (2006.01); B29C 59/02 (2006.01); B29C 35/08 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 35/0805 (2013.01); B29C 59/022 (2013.01); B29C 2035/0827 (2013.01); B29C 2035/0833 (2013.01); B82Y 40/00 (2013.01);
Abstract
An apparatus, method, and frame window configured to clean mesa sidewalls of a template with photodissociation radiation. Material on the mesa sidewalls are removed from the mesa sidewalls by exposing the portion of a first gap adjacent to the mesa sidewalls to the photodissociation radiation.