The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Jul. 18, 2019
Kabushiki Kaisha Nihon Micronics, Tokyo, JP;
Yoshiyuki Fukami, Tokyo, JP;
KABUSHIKI KAISHA NIHON MICRONICS, Tokyo, JP;
Abstract
To reduce inspection time by changing an action speed of a movable axis movable part while considering size information of an electrode terminal as a contact destination of a probe. An inspection apparatus of the present disclosure is an inspection apparatus with a plurality of movable probes that brings each of the movable probes into contact with each of a plurality of objects to be inspected on a board to be inspected so as to measure electrical characteristics between the objects to be inspected. The inspection apparatus includes a plurality of movable parts that support the movable probes, move the movable probes in a plurality of axis directions, and position the movable probes at positions of the objects to be inspected so that the movable probes are in contact with the objects to be inspected, a drive unit that drives the movable parts moving the movable probes, and a drive control unit that controls an action speed of the movable parts moving the movable probes in accordance with size information of the objects to be inspected as next contact destinations of the movable probes.