The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

Aug. 03, 2016
Applicant:

Hitachi Automotive Systems, Ltd., Hitachinaka, JP;

Inventors:

Masatoshi Kanamaru, Tokyo, JP;

Daisuke Maeda, Tokyo, JP;

Masahide Hayashi, Hitachinaka, JP;

Masashi Yura, Hitachinaka, JP;

Akihiro Okamoto, Hitachinaka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); B81B 3/00 (2006.01); G01P 15/08 (2006.01); H01L 29/84 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/08 (2013.01); B81B 3/0002 (2013.01); B81B 3/0051 (2013.01); B81B 7/0016 (2013.01); G01P 15/125 (2013.01); H01L 29/84 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/04 (2013.01); B81B 2203/056 (2013.01); B81B 2207/012 (2013.01); G01P 2015/0862 (2013.01); G01P 2015/0882 (2013.01);
Abstract

To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.


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