The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

Feb. 06, 2019
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventor:

Yasuhiko Kaneko, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); G01N 21/88 (2006.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); G01N 21/88 (2013.01); G01N 21/8851 (2013.01); G06T 7/0004 (2013.01); G01N 2021/8883 (2013.01); G01N 2223/03 (2013.01); G01N 2223/052 (2013.01); G01N 2223/401 (2013.01); G01N 2223/646 (2013.01); G06T 2207/30108 (2013.01);
Abstract

A defect inspection device, a defect inspection method, and a computer readable medium accurately and rapidly detect a minute defect and a defect candidate indicated by a signal in a received light image of an inspection object. A defect inspection device includes an image acquisition unit, an input unit, an exposure condition acquisition unit, memory, and a parameter determination unit that determines an image processing parameter for a received light image based on an exposure condition acquired by the exposure condition acquisition unit, a physical feature received by the input unit, and exposure information stored in memory, and an image processing unit extracts a defect candidate image which corresponds to a defect candidate of the inspection object from the received light image by performing image processing of the received light image based on the image processing parameter determined by the parameter determination unit.


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