The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

Jun. 27, 2019
Applicant:

Government of the United States of America, As Represented BY the Secretary of Commerce, Gaithersburg, MD (US);

Inventors:

Christopher S. Yung, Louisville, CO (US);

Nathan A. Tomlin, Boulder, CO (US);

Daniel R. Schmidt, Boulder, CO (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); C23C 16/26 (2006.01); C23C 14/58 (2006.01); G01J 5/22 (2006.01); G01J 5/20 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
G01J 5/023 (2013.01); C23C 14/083 (2013.01); C23C 14/5806 (2013.01); C23C 16/26 (2013.01); G01J 5/22 (2013.01); G01J 2005/202 (2013.01);
Abstract

A recessed carbon nanotube article includes a base; a substrate disposed on the base; wells disposed in the substrate and bounded by the base and a substrate wall; and a carbon nanotube element disposed in individual wells and including vertically aligned carbon nanotubes such that a longitudinal length of the vertically aligned carbon nanotubes is less than a depth of the well in which the carbon nanotube element is disposed. A recessed carbon nanotube bolometer includes a base; a substrate on the base; radiation wells in the substrate; carbon nanotubes in the wells; thermistors and heaters on the membrane arranged as an electrical substitution member. A process for making a recessed carbon nanotube bolometer includes forming a substrate on a base; forming a radiation well in the substrate; forming carbon nanotubes in the well; disposing a cover on the wells; and forming a thermistor and a heater on the base.


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