The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
May. 26, 2019
Dmt Corporation, Pyeongtaek-si, KR;
Jong-Kyu Seo, Yongin-si, KR;
DMT Corporation, Pyeongtaek, KR;
Abstract
Provided is equipment for transferring a vacuum chamber that solves a problem of heat dissipation of a driver by (i) placing a permanent magnet, which is a stator structure of a linear motor and causes linear motion, inside a vacuum chamber and (ii) by placing a coil of a driver structure outside the vacuum chamber. Under this structure, (i) no cable is installed in inside the chamber, and (ii) heat generated from the driver structure can be smoothly dissipated. The transfer equipment includes: a first-axis linear coil () that is fixed to an outside of the vacuum chamber at a bottom surface of the housing () of the vacuum chamber (); a first-axis slider () that is installed inside the vacuum chamber () and moves in a first-axis direction relative to a bottom of an inner space of the vacuum chamber (); and a first-axis linear permanent magnet (). The first-axis linear permanent magnet () is arranged in the first-axis direction, is installed in a lower portion of the first-axis slider (), and slidingly moves together with the first-axis slider ().