The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Dec. 22, 2015
Applicant:
Basf Coatings Gmbh, Muenster, DE;
Inventors:
Maraike Ahlf, Schriesheim, DE;
Juergen Frank, Ludwigshafen, DE;
Torben Adermann, Heidelberg, DE;
Stephan Klotz, Dornach, CH;
Assignee:
BASF Coatings GmbH, Muenster, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45529 (2013.01); C23C 16/45534 (2013.01); C23C 16/45553 (2013.01); H01L 51/5256 (2013.01);
Abstract
Processes for producing flexible organic-inorganic laminates by atomic layer deposition are described, as well as barrier films comprising flexible organic-inorganic laminates. In particular, a process for producing a laminate including (a) depositing an inorganic layer by an atomic layer deposition process, and (b) depositing an organic layer comprising selenium by a molecular layer deposition process is provided.