The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

May. 01, 2019
Applicants:

Chengdu Boe Optoelectronics Technology Co., Ltd., Sichuan, CN;

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Yifan Yang, Beijing, CN;

Peng Cao, Beijing, CN;

Ming Zhao, Beijing, CN;

Wanmei Qing, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 14/24 (2006.01); G01B 17/02 (2006.01); G01N 29/24 (2006.01); H01L 41/053 (2006.01); H01L 51/56 (2006.01); G01B 7/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/546 (2013.01); C23C 14/24 (2013.01); G01B 17/02 (2013.01); G01N 29/2443 (2013.01); H01L 41/0533 (2013.01); G01B 7/066 (2013.01); H01L 51/56 (2013.01);
Abstract

A crystal oscillation probe structure and an evaporation device are provided. The crystal oscillation probe structure includes a guide cover, a crystal oscillation probe and a mesh screen structure, the guide cover includes a chamber with a guide opening, the crystal oscillation probe is fixed in the chamber, the crystal oscillation probe includes at least one crystal oscillation sheet, the mesh screen structure includes a plurality of openings, and the mesh screen structure is located on a traveling path of a material traveling toward the at least one crystal oscillation sheet and disposed on a side of the at least one crystal oscillation sheet facing the guide opening.


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