The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2021
Filed:
Dec. 06, 2018
Applicant:
National Cheng Kung University, Tainan, TW;
Inventors:
Jyh-Ming Ting, Taipei, TW;
Tun-Yi Chang, Taichung, TW;
Assignee:
NATIONAL CHENG KUNG UNIVERSITY, Tainan, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/02 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0015 (2013.01); C23C 14/0052 (2013.01); C23C 14/0057 (2013.01); C23C 14/021 (2013.01); C23C 14/0676 (2013.01);
Abstract
The present invention provides a color film and a method of forming the same. In some embodiments, only one titanium target is used, and a flowrate of nitrogen gas, a working pressure, a sputtering power and a sputtering time are adjusted, so as to form single-layered titanium oxynitride color films having different colors and thicknesses. The color film has satisfactory adhesivity, a flat surface and metallic luster.