The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 27, 2021

Filed:

May. 25, 2016
Applicant:

Berliner Glas Kgaa Herbert Kubatz Gmbh & Co., Berlin, DE;

Inventors:

Ralf Hammer, Freiberg, DE;

Stefan Hoescheler, Berlin, DE;

Mike Fischer, Berlin, DE;

Gregor Hasper, Berlin, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/352 (2014.01); B23K 26/00 (2014.01); H01L 21/683 (2006.01); B23K 26/361 (2014.01); B23K 103/00 (2006.01); B23K 26/08 (2014.01); B23K 26/0622 (2014.01); B23K 37/02 (2006.01); B23K 26/402 (2014.01);
U.S. Cl.
CPC ...
B23K 26/355 (2018.08); B23K 26/0006 (2013.01); B23K 26/0622 (2015.10); B23K 26/0884 (2013.01); B23K 26/352 (2015.10); B23K 26/361 (2015.10); B23K 26/402 (2013.01); B23K 37/0235 (2013.01); H01L 21/6833 (2013.01); H01L 21/6838 (2013.01); B23K 2103/52 (2018.08);
Abstract

Method of manufacturing holding plate () including ceramic material of several chemical elements and configured for holding apparatus () for holding a component by electrostatic forces or vacuum, includes the steps of material removal from holding plate () by laser ablation, wherein by laser irradiation () protrusions () are formed on holding plate (), end faces () of which span a carrier surface for the component, and surface modification of holding plate () by laser irradiation (), wherein irradiation parameters of laser irradiation () are set such that at least one of the chemical elements of the ceramic material is enriched on the surface of holding plate (). A method is also described of manufacturing holding apparatus () for holding a component by electrostatic forces or vacuum, holding plate () which is produced with the inventive method, and holding apparatus () with at least one holding plate ().


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