The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Aug. 13, 2018
Ordos Yuansheng Optoelectronics Co., Ltd., Ordos, CN;
Boe Technology Group Co., Ltd., Beijing, CN;
Zhiming Lin, Beijing, CN;
Chunchieh Huang, Beijing, CN;
Bili Baiyin, Beijing, CN;
Zhiyuan Hao, Beijing, CN;
De Zhang, Beijing, CN;
Xiaolin Xin, Beijing, CN;
Xu Liu, Beijing, CN;
Dongwei Li, Beijing, CN;
ORDOS YUANSHENG OPTOELECTRONICS CO., LTD., Inner Mongolia, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
The embodiments of the present disclosure propose a device for inspecting a mask plate, a method for inspecting a mask plate, and a corresponding method for controlling light sources. The device includes: an image sensor configured to capture an image of the mask plate; and a plurality of light sources disposed on one side of the mask plate opposite to the image sensor, wherein at least one of the plurality of light sources is configure to emit light when the image sensor is capturing an image of a first region of the mask plate, and the at least one light source comprises light sources within a first range, wherein the first range corresponds to the first region and an orthographic projection of the image sensor on a light source plane falls within the first range. The method for controlling light sources includes: turning on at least one of a plurality of light sources disposed on one side of the mask plate opposite to an image sensor, which corresponds to a first region of the mask plate to be inspected, when the image sensor is moved to a position corresponding to the first region.