The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2021

Filed:

Sep. 20, 2019
Applicant:

Samsung Electronics Co., Ltd., Gyeonggi-do, KR;

Inventors:

Joon Goo Hong, Austin, TX (US);

Rwik Sengupta, Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 23/50 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5286 (2013.01); H01L 21/76879 (2013.01); H01L 23/50 (2013.01); H01L 23/5226 (2013.01); H01L 23/53257 (2013.01);
Abstract

An integrated circuit (IC) apparatus and a method of forming a conductive material in a backside of an IC are provided. The IC apparatus includes a substrate including a frontside and a backside; at least one first insulating material deposited in the backside of the substrate in a form of a trench; a conductive material deposited in each of the at least one first insulating material; at least one second insulating material deposited on the conductive material to insulate the conductive material from the substrate; an epitaxial crystalline material grown on the frontside of the substrate; at least one semiconductor component formed in the epitaxial crystalline material; and at least one via formed in the substrate to connect the conductive material to the at least one semiconductor component.


Find Patent Forward Citations

Hong, Joon. (2021). Apparatus and method of forming backside buried conductor in integrated circuit (U.S. Patent No. 10985103). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10985103

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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