The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Nov. 28, 2018
Kasuga Denki, Inc., Kanagawa, JP;
Japan Aerospace Exploration Agency, Tokyo, JP;
Nobuo Nomura, Kawasaki, JP;
Tomofumi Mogami, Kawasaki, JP;
Kazuki Minemura, Kawasaki, JP;
Daiki Koda, Tokyo, JP;
Takato Morishita, Tokyo, JP;
Satoshi Hosoda, Tokyo, JP;
Hitoshi Kuninaka, Tokyo, JP;
Abstract
A charge neutralizer that includes a vacuum chamber which is capable of having a charged object installed therein and includes a high vacuum processing unit that performs vapor deposition, and a plasma generator configured to supply plasma caused by an electron cyclotron resonance to an inside of the vacuum chamber. The plasma generator includes a plasma source configured to generate the plasma, and a flange configured to install the plasma source inside the vacuum chamber.