The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Mar. 16, 2017
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Hiroyuki Nagasaka, Kumagaya, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); G03F 7/20 (2006.01); H01J 37/317 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01J 37/304 (2013.01); G03F 7/20 (2013.01); G03F 7/70025 (2013.01); H01J 37/3174 (2013.01); H01L 21/027 (2013.01); H01J 2237/0216 (2013.01); H01J 2237/3045 (2013.01); H01J 2237/31771 (2013.01); H01J 2237/31774 (2013.01);
Abstract
A charged particle beam optical apparatus has a plurality of irradiation optical systems each of which irradiates an object with a charged particle beam and a first control apparatus configured to control a second irradiation optical system on the basis of an operation state of a first irradiation optical system.