The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Apr. 25, 2019
Applicant:
Saudi Arabian Oil Company, Dhahran, SA;
Inventors:
Assignee:
Saudi Arabian Oil Company, Dhahran, SA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 23/34 (2006.01); G03F 7/038 (2006.01); G03F 7/075 (2006.01); G03F 7/32 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2059 (2013.01); G03F 7/038 (2013.01); G03F 7/0757 (2013.01); G03F 7/325 (2013.01); G03F 7/40 (2013.01); H01L 23/34 (2013.01);
Abstract
A method for fabricating calcite channels in a nanofluidic device is described. A photoresist is coated on a substrate, and a portion of the photoresist is then exposed to a beam of electrons in a channel pattern. The exposed portion of the photoresist is developed to form a channel pattern, and calcite is deposited in the channel pattern using a calcite precursor gas. The deposited calcite includes at least one side having a length in a range of approximately 50 to 100 nanometers. The photoresist remaining after developing the exposed portion of the photoresist is removed.