The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Aug. 18, 2020
Applicant:
Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;
Inventor:
Chun-Liang Lin, Hsinchu, TW;
Assignee:
Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/36 (2012.01); G03F 1/70 (2012.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G03F 1/70 (2013.01);
Abstract
A retargeting method for optical proximity correction (OPC) is provided. The method includes: assigning evaluation points for defining profile of a layout pattern; identifying critical regions of the layout pattern that could result in limitation on the process window of the OPC; categorizing the critical regions based on geometries of the critical regions; obtaining movable ranges and address information of the evaluation points; and shifting the evaluation points according to the parameters obtained during the previous steps.