The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2021

Filed:

May. 12, 2015
Applicant:

Korea University Research and Business Foundation, Seoul, KR;

Inventors:

Jong-Heun Lee, Seoul, KR;

Yunchan Kang, Seoul, KR;

Ji-Wook Yoon, Seoul, KR;

Su-Jin Hwang, Suwon-Si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01); G01N 33/00 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0027 (2013.01); G01N 27/127 (2013.01); G01N 33/0047 (2013.01); H01L 21/0242 (2013.01); H01L 21/02491 (2013.01); H01L 21/02565 (2013.01); H01L 21/02601 (2013.01); H01L 21/02628 (2013.01); H01L 29/0665 (2013.01); H01L 29/245 (2013.01);
Abstract

Provided is an oxide semiconductor gas sensor with improved performance that senses selectively methylbenzene gases with high sensitivity. The gas sensor includes a gas sensing layer composed of palladium (Pd)-loaded cobalt oxide (CoO) nanostructures. The response of the gas sensor according to the present invention to xylene gas at a concentration as low as 5 ppm is at least 150 times higher than that to ethanol gas. The response of the gas sensor to toluene gas at a concentration as low as 5 ppm is at least 100 times higher than that to ethanol gas. In addition, the oxide semiconductor gas sensor has the ability to selectively detect methylbenzene gases, including xylene and toluene (with at least 30-fold higher response to xylene and at least 15 times higher response to toluene than that to ethanol gas).


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