The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2021

Filed:

Feb. 12, 2019
Applicant:

Denso Corporation, Kariya, JP;

Inventors:

Shinji Kawano, Kariya, JP;

Kazuaki Mawatari, Kariya, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 19/06 (2006.01); G01L 9/02 (2006.01); G01L 19/14 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0041 (2013.01); G01L 9/00 (2013.01); G01L 9/02 (2013.01); G01L 19/06 (2013.01); G01L 19/0645 (2013.01); G01L 19/148 (2013.01); H01L 29/84 (2013.01);
Abstract

A pressure sensor detects a pressure of a pressure transmitting medium. The pressure sensor includes a sensor substrate and a protection film. The sensor substrate includes a recess recessed relative to a periphery thereof and a thin portion thinner than the periphery due to the recess. The protection film is provided on a bottom surface of the recess that is one side of the thin portion and a part of a lateral surface of the recess, and the protection film suppresses an adhesion of a contamination contained in the pressure transmitting medium. The pressure sensor includes an adhesion suppressing portion that includes an uneven section formed in at least a part of the lateral surface, and a liquid repellent film repellent to liquid in the pressure transmitting medium and provided as the protection film on the uneven section to exhibit a lotus effect.


Find Patent Forward Citations

Loading…