The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 2021

Filed:

Mar. 14, 2018
Applicant:

Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Inventors:

Sébastien Becker, Voiron, FR;

Abdelkader Aliane, Grenoble, FR;

Denis Pelenc, Quaix en Chartreuse, FR;

Jean-Jacques Yon, Sassenage, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 1/04 (2006.01); G01J 5/08 (2006.01); G01J 5/04 (2006.01); G01J 5/20 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
G01J 1/04 (2013.01); G01J 5/045 (2013.01); G01J 5/08 (2013.01); G01J 5/20 (2013.01); H01L 27/14669 (2013.01);
Abstract

A radiation sensor including a plurality of pixels formed in and on a semiconductor substrate, each pixel including a microboard suspended above the substrate by thermal insulation arms, the microboard including: a conversion element for converting incident electromagnetic radiation into thermal energy; and a passive optical shutter including a heat-sensitive layer covering one of the faces of the conversion element, the heat-sensitive layer having a reflection coefficient for the radiation to be detected that increases as a function of its temperature.


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