The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Mar. 31, 2017
Applicant:
Wayne State University, Detroit, MI (US);
Inventor:
Charles H. Winter, Bloomfield Hills, MI (US);
Assignee:
WAYNE STATE UNIVERSITY, Detroit, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 4/00 (2006.01); C23C 16/455 (2006.01); C23F 1/00 (2006.01); C23F 1/12 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
C23F 4/00 (2013.01); C23C 16/45553 (2013.01); C23C 16/56 (2013.01); C23F 1/00 (2013.01); C23F 1/12 (2013.01);
Abstract
A method for etching a metal surface includes a step of contacting a metal surface with a protic compound for a first time period to produce a first modified surface. The first modified surface is contacted with a protic ligand-forming compound that reacts with the first modified surface to form a volatile metal-containing compound including a metal atom and the protic ligand-forming compound. The volatile metal-containing compound is removed from the vicinity of the metal surface.