The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Nov. 23, 2012
Applicant:
Oerlikon Trading Ag, Trubbach, Trubbach, CH;
Inventors:
Siegfried Krassnitzer, Feldkirch, AT;
Helmut Rudigier, Bad Ragaz, CH;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/35 (2013.01); C23C 14/3464 (2013.01); C23C 14/3485 (2013.01); C23C 14/3492 (2013.01); C23C 14/542 (2013.01); H01J 37/3417 (2013.01); H01J 37/3467 (2013.01);
Abstract
The invention relates to a HiPIMS method by means of which homogeneous layers can be deposited over the height of a coating chamber. Two partial cathodes are used for said purpose. According to the invention, the length of the individual power pulse intervals applied to the partial cathodes is chosen individually and thus a required coating thickness profile over the height of the coating chamber is achieved.