The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Aug. 23, 2018
Kobe Steel, Ltd., Kobe, JP;
Shinichi Tanifuji, Kobe, JP;
Kenji Yamamoto, Kobe, JP;
Kobe Steel, Ltd., Kobe, JP;
Abstract
An arc evaporation source () according to one embodiment of the present invention comprises: a ring-shaped circumferential magnet () which is so arranged as to surround the outer circumference of a target () along a direction in which the direction of magnetization becomes parallel with the front surface of the target; and a rear surface magnet () which is arranged on the rear surface side of the target () along a direction in which the direction of magnetization becomes perpendicular to the front surface of the target. The magnetic pole of the circumferential magnet () on the inner side in the radial direction and the magnetic pole of the rear surface magnet () on the target () side have the same polarity as each other.