The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Dec. 13, 2017
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventors:
Youwei Wang, Beijing, CN;
Song Zhang, Beijing, CN;
Tao Sun, Beijing, CN;
Ping Song, Beijing, CN;
Peng Cai, Beijing, CN;
Yuanzheng Guo, Beijing, CN;
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01); C23C 14/12 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); C23C 14/12 (2013.01); H01L 51/001 (2013.01); H01L 51/56 (2013.01); H01L 51/0011 (2013.01);
Abstract
A mask plate, a manufacturing method of the mask plate, and a method of evaporation by using the mask plate are provided. The mask plate includes an opening plate, the opening plate includes an opening and a blocking portion outside the opening, a concavity is in the blocking portion, and a depth of the concavity is smaller than a thickness of the blocking portion.