The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Apr. 14, 2016
Applicants:
Seoul Semiconductor Co., Ltd., Ansan, KR;
Solution Deposition Systems, Inc., Goleta, CA (US);
Inventors:
Jacob J. Richardson, Santa Barbara, CA (US);
Evan C. O'Hara, Santa Barbara, CA (US);
Assignee:
Seoul Semiconductor Co., Ltd., Ansan, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 19/06 (2006.01); C01G 9/02 (2006.01); B01J 19/00 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
C01G 9/02 (2013.01); B01J 19/00 (2013.01); C30B 35/002 (2013.01);
Abstract
Briefly, embodiments of systems and/or methods for synthesis of zinc oxide are described, including a chamber enclosure, a wafer substrate holder, a fluid handling system, and sequences for implementation.