The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2021
Filed:
Aug. 19, 2019
Infineon Technologies Ag, Neubiberg, DE;
Wolfgang Klein, Zorneding, DE;
Evangelos Angelopoulos, Munich, DE;
Stefan Barzen, Munich, DE;
Marc Fueldner, Neubiberg, DE;
Stefan Geissler, Regensburg, DE;
Matthias Friedrich Herrmann, Munich, DE;
Ulrich Krumbein, Rosenheim, DE;
Konstantin Tkachuk, Unterhaching, DE;
Giordano Tosolini, Munich, DE;
Juergen Wagner, Nittendorf, DE;
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Abstract
A microfabricated structure includes a deflectable membrane, a first clamping layer on a first surface of the deflectable membrane, a second clamping layer on a second surface of the deflectable membrane, a first perforated backplate on the first clamping layer, and a second perforated backplate on the second clamping layer, wherein the first clamping layer comprises a first tapered edge portion having a negative slope between the first perforated backplate and the deflectable membrane.