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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10981304 B1

PDFFull Text
Date of Patent:
Apr. 20, 2021

Filed:

Jun. 01, 2017

Method of nanoscale patterning based on controlled pinhole formation

Applicant:

Okinawa Institute of Science and Technology School Corporation, Okinawa, JP;

Inventors:

Yabing Qi, Kunigami-gun, JP;

Luis Katsuya Ono, Kunigami-gun, JP;

Assignee:

OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION, Okinawa, JP;

Attorney:

Westerman, Hattori, Daniels & Adrian, LLP

Primary Examiner:

Nahida Sultana

Int. Cl.
CPC ...
B29C 41/12 (2006.01); B29C 33/38 (2006.01); H01L 51/00 (2006.01); B29C 59/02 (2006.01); B81C 99/00 (2010.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); B29C 33/42 (2006.01); H01L 51/42 (2006.01); B01D 67/00 (2006.01); B29L 31/00 (2006.01);
U.S. Cl.
CPC ...
B29C 41/12 (2013.01); B29C 33/3857 (2013.01); B29C 59/02 (2013.01); B29C 59/022 (2013.01); B81C 99/009 (2013.01); H01L 51/0004 (2013.01); H01L 51/0007 (2013.01); B01D 67/0011 (2013.01); B01D 67/0013 (2013.01); B29C 59/025 (2013.01); B29C 2033/3864 (2013.01); B29C 2033/426 (2013.01); B29L 2031/7562 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); H01L 51/4226 (2013.01); Y02P 70/50 (2015.11);
Abstract

A method of nanoscale patterning is disclosed. The method comprises: mixing predetermined amounts of a first solvent and a second solvent to generate a solvent, the first solvent and the second solvent being immiscible with each other; dissolving a solute material in the solvent to generate a coating material, the solute material having solubility that is higher in the first solvent than in the second solvent; and applying the coating material onto a substrate to form a plurality of pinholes in the coating material. The formation of the plurality of pinholes is associated with suspension drops mostly comprised of the second solvent, separated from the solute material dissolved in the first solvent, in the coating material. A method of making a stamp with a nanoscale pattern is also disclosed based on the above method.

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