The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Dec. 09, 2019
Applicant:
Aac Acoustic Technologies (Shenzhen) Co., Ltd., Shenzhen, CN;
Inventors:
Zhenkui Meng, Shenzhen, CN;
Zhengyan Liu, Shenzhen, CN;
Assignee:
AAC Acoustic Technologies (Shenzhen) Co., Ltd., Shenzhen, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); H04R 19/04 (2006.01); H04R 7/10 (2006.01);
U.S. Cl.
CPC ...
H04R 31/003 (2013.01); H04R 7/10 (2013.01); H04R 19/04 (2013.01); H04R 2201/003 (2013.01); H04R 2307/025 (2013.01);
Abstract
The invention provides a method for manufacturing a MEMS microphone. The method comprises steps of: preparing a base; forming a first diaphragm on a first surface of the base; preparing a back plate; forming a first gap between the first diaphragm and the back plate; preparing a second diaphragm opposite to the first diaphragm; forming a second gap between the second diaphragm and the back plate; preparing electrodes on the second diaphragm; forming a back cavity by etching a second surface of the base opposite to the first surface.