The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Jul. 02, 2019
Applicant:

SK Hynix Inc., Icheon-si, KR;

Inventor:

In-Su Park, Icheon-si, KR;

Assignee:

SK hynix Inc., Icheon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 29/10 (2006.01); H01L 27/1157 (2017.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1037 (2013.01); H01L 21/762 (2013.01); H01L 27/1157 (2013.01); H01L 27/11582 (2013.01);
Abstract

A semiconductor device includes a first stacked structure including word lines and dielectric layers alternately stacked over a substrate. The semiconductor device also includes a plurality of first vertical channel structures formed through the first stacked structure and a second stacked structure including gate electrodes and dielectric layers alternately stacked over the first stacked structure. The semiconductor device further includes a plurality of second vertical channel structures formed through the second stacked structure, wherein the plurality of second vertical channel structures are respectively connected to the plurality of first vertical channel structures. The semiconductor device additionally includes an isolating layer for isolating the plurality of second vertical channel structures into first and second regions. Both sidewalls of the isolating layer contact sidewalls of the second vertical channel structures of the plurality of second vertical channel structures positioned at the boundary between the first and second regions.


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