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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10978325 B1

PDFFull Text
Date of Patent:
Apr. 13, 2021

Filed:

May. 24, 2019

Substrate storage container management system, load port, and substrate storage container management method

Applicant:

Sinfonia Technology Co., Ltd., Tokyo, JP;

Inventors:

Izumi Ito, Tokyo, JP;

Tomoya Mizutani, Tokyo, JP;

Assignee:

Sinfonia Technology Co., Ltd., Tokyo, JP;

Attorney:

Kilpatrick Townsend & Stockton LLP

Primary Examiner:

Michael G Lee

Assistant Examiner:

David Tardif

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); G06K 7/10 (2006.01); B65G 1/137 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67294 (2013.01); B65G 1/1373 (2013.01); G06K 7/10366 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); B65G 2203/046 (2013.01);
Abstract

A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.

Find Patent Forward Citations

Ito, Izumi. (2021). Substrate storage container management system, load port, and substrate storage container management method (U.S. Patent No. 10978325). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10978325

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