The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Sep. 22, 2017
Applicants:

Horiba, Ltd., Kyoto, JP;

Horiba Stec, Co., Ltd., Kyoto, JP;

Inventors:

Takahito Inoue, Kyoto, JP;

Hiroshi Uchihara, Kyoto, JP;

Kohei Sasai, Kyoto, JP;

Toshihiro Ikeyama, Kyoto, JP;

Assignees:

HORIBA, LTD., Kyoto, JP;

HORIBA STEC, CO., LTD., Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 30/32 (2006.01); H01J 49/04 (2006.01); H01J 49/00 (2006.01); H01J 49/42 (2006.01); G01N 31/12 (2006.01); G01N 27/62 (2021.01); H01J 49/24 (2006.01); G01N 33/2025 (2019.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/049 (2013.01); G01N 27/62 (2013.01); G01N 30/32 (2013.01); G01N 31/12 (2013.01); G01N 33/0016 (2013.01); G01N 33/0026 (2013.01); G01N 33/2025 (2019.01); H01J 49/0027 (2013.01); H01J 49/04 (2013.01); H01J 49/0495 (2013.01); H01J 49/24 (2013.01); H01J 49/4205 (2013.01); G01N 2030/328 (2013.01);
Abstract

An objective of this invention is to conduct an accurate quantitative analysis on the Ar element contained in a sample gas by an element analysis device comprising a heating furnace and a mass spectrometer for conducting a quantitative analysis on an element in a vacuum atmosphere. The element analysis device comprises: a heating furnace that heats a graphite crucible containing a sample while introducing a carrier gas into the heating furnace, thereby vaporizing the sample to generate a sample gas; a quadrupole mass spectrometer that conducts the quantitative analysis on the Ar element contained in the sample gas in a mixed gas comprising the carrier gas and the sample gas discharged from the heating furnace, a first pressure regulator that controls the pressure of the carrier gas to be introduced into the heating furnace, and a second pressure regulator that controls the pressure of the mixed gas discharged from the heating furnace.


Find Patent Forward Citations

Loading…