The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Oct. 03, 2017
Applicant:

Airex Co., Ltd., Nagoya, JP;

Inventor:

Koji Kawasaki, Nagoya, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01M 3/02 (2006.01); B01D 46/00 (2006.01); B01D 46/44 (2006.01); B01D 46/46 (2006.01); B01D 46/42 (2006.01); G01N 15/08 (2006.01); G01M 3/00 (2006.01);
U.S. Cl.
CPC ...
G01M 3/02 (2013.01); B01D 46/009 (2013.01); B01D 46/42 (2013.01); B01D 46/442 (2013.01); B01D 46/46 (2013.01); G01M 3/00 (2013.01); G01N 15/08 (2013.01); B01D 2273/18 (2013.01);
Abstract

Provided are a leak inspection assistance device and a leak inspection method using the same which enable using a normal leak inspection device in a leak inspection of filters in a clean room, have a small cost burden since a scanning robot, large-scape equipment, an incidental work, and the like are not required, and enable performing the accurate leak inspection with a small number of workers. A projection device which projects a suction point of a suction probe adjunct to a leak inspection device which performs a leak inspection onto a surface of a filter in a clean room in such a manner that the suction point moves in X-Y axis directions orthogonal to each other along the surface of the filter at a fixed interval and a fixed speed is provided, and a worker uses the suction probe for scanning in accordance with movement of the suction point.


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