The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Apr. 02, 2019
Applicant:
Seek Thermal, Inc., Goleta, CA (US);
Inventor:
William J. Parrish, Santa Barbara, CA (US);
Assignee:
Seek Thermal, Inc., Goleta, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/04 (2006.01); G01J 5/20 (2006.01); G01J 5/00 (2006.01);
U.S. Cl.
CPC ...
G01J 5/045 (2013.01); G01J 5/20 (2013.01); G01J 2005/0077 (2013.01); G01J 2005/204 (2013.01);
Abstract
Focal Plane Arrays (FPAs) or methods to produce FPAs may be provided for a microbolometer based thermal imaging sensor utilizing wafer level processing (WLP) techniques for manufacture. Batch processing techniques for sealing a cap wafer to an FPA wafer to produce vacuum sealed FPAs may be accomplished with suitable FPA design features in conjunction with a glass frit seal methodology utilizing appropriate frit glass compositions.