The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 13, 2021

Filed:

Dec. 26, 2018
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Yuan Chin Lee, Hsinchu, TW;

Ting Wei Chang, New Taipei, TW;

Chi Shen Chang, Hsinchu County, TW;

Chy Lin Wang, Hsinchu County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G02B 27/12 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02015 (2013.01); G01B 9/02091 (2013.01); G02B 27/123 (2013.01);
Abstract

An optical interferometer includes a beam splitter module and an optical sensor. The beam splitter module includes a lens assembly and a splitter cube. A light incident surface of the splitter cube is substantially orthogonal to an optical axis of the lens assembly. An acute angle is between the light incident surface and a light splitting surface of the splitter cube. A sampling surface of the splitter cube is substantially parallel to the light incident surface. A light reflecting surface of the splitter cube is substantially orthogonal to the light incident surface. The light incident surface is closer to the lens assembly than the sampling surface. A reference arm is defined between a splitter position on the light splitting surface and the light reflecting surface, a sample arm is defined between the splitter position and the sampling surface, and the reference arm is longer than the sample arm.


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