The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Mar. 01, 2018
Applicant:
Sumco Corporation, Tokyo, JP;
Inventor:
Haku Komori, Tokyo, JP;
Assignee:
SUMCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/14 (2006.01); C30B 25/10 (2006.01); C30B 25/12 (2006.01); C30B 35/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C30B 25/14 (2013.01); C30B 25/10 (2013.01); C30B 25/12 (2013.01); C30B 35/007 (2013.01); H01L 21/68714 (2013.01);
Abstract
An epitaxial growth apparatus that can provide an improved thickness uniformity of an epitaxial film is provided. An epitaxial growth apparatus in accordance with the present disclosure includes a susceptor and a preheat ring surrounding a side of the susceptor having a gap interposed therebetween. A width of the gap at least in part between the susceptor and the preheat ring is set to be longer than a width wof the gap between the susceptor and the preheat ring in the vicinity of the reactant gas inlet.