The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Jan. 08, 2019
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
John Shugrue, Phoenix, AZ (US);
Carl White, Gilbert, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 16/505 (2006.01); G01N 21/73 (2006.01); G01N 21/68 (2006.01); G01J 3/443 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H05H 1/46 (2006.01); H01J 37/32 (2006.01); G01N 21/15 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45536 (2013.01); C23C 16/45544 (2013.01); C23C 16/505 (2013.01); G01J 3/443 (2013.01); G01N 21/68 (2013.01); H01J 37/3244 (2013.01); H01J 37/32972 (2013.01); G01N 21/15 (2013.01); G01N 2201/08 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/24507 (2013.01);
Abstract
An apparatus and method are disclosed for monitoring and/or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.